All‐Solid‐State Thin Film μ‐Batteries for Microelectronics
The concept of thin-film batteries or μ-batteries have been proposed for a few decays. [] However it is a long and difficult match since the fabrication of the all-solid-state thin-film μ-batteries (ATFBs) relies on the development of solid electrolytes with reasonably high ionic conductivity and chemical and electrochemical stability.